Thermally-assisted magnetic recording head and thermally-assisted magnetic recording method

ABSTRACT

A magnetic recording head capable of a satisfying thermally-assisted magnetic recording without depending on the use of a near-field light generator is provided. The head comprises a waveguide and a main magnetic pole having a main pole tip. Further, at least a portion of the main pole tip is embedded in a groove provided in the upper surface of the waveguide. Further, a second clad layer is provided on the first clad layer and on a rear side from the main pole tip. This configuration of the first and second clad layers suppresses the absorption of the light propagating through the waveguide by the main magnetic pole. Further, the configuration in which at least a portion of the main pole tip is embedded in the groove can cause the distance between the light spot center of the waveguide and the main magnetic pole to be sufficiently small.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a thermally-assisted magnetic recording method in which a magnetic recording medium is irradiated with light, thereby anisotropic magnetic field of the medium is lowered, then, magnetic recording is performed. Further, the present invention relates to a thermally-assisted magnetic recording head which writes data by using the thermally-assisted magnetic recording method.

2. Description of the Related Art

As the recording density of a magnetic recording apparatus becomes higher, as represented by a magnetic disk apparatus, further improvement has been required in the performance of a thin-film magnetic head and a magnetic recording medium. As the thin-film magnetic head, a composite-type thin-film magnetic head is widely used, which has a stacked structure of a magnetoresistive (MR) element for reading data and an electromagnetic transducer for writing data.

Whereas, the magnetic recording medium is generally a kind of discontinuous body of magnetic microparticles gathered together, and each of the magnetic microparticles has an approximately single magnetic domain structure. Here, one record bit consists of a plurality of the magnetic microparticles. Therefore, in order to improve the recording density, it is necessary to decrease the size of the magnetic microparticles and reduce irregularity in the boundary of the record bit. However, the decrease in size of the magnetic microparticles raises a problem of degradation in thermal stability of the magnetization due to the decrease in volume.

As a measure against the thermal stability problem, it may be possible to increase the magnetic anisotropy energy K_(U) of the magnetic microparticles. However, the increase in energy K_(U) causes the increase in anisotropic magnetic field (coercive force) of the magnetic recording medium. Whereas, the intensity of write field generated from the thin-film magnetic head is limited by the amount of saturation magnetic flux density of the soft-magnetic material of which the magnetic core of the head is formed. Therefore, the head cannot write data to the magnetic recording medium when the anisotropic magnetic field of the medium exceeds the write field limit.

Recently, as a method for solving the problem of thermal stability, so-called a thermally-assisted magnetic recording technique is proposed. In the technique, a magnetic recording medium formed of a magnetic material with a large energy K_(U) is used so as to stabilize the magnetization; anisotropic magnetic field of the medium is reduced by applying heat to a portion of the medium, where data is to be written; just after that, writing is performed by applying write field to the heated portion.

As generally-known thermally-assisted magnetic recording techniques, U.S. Pat. No. 6,768,556 and U.S. Pat. No. 6,649,894 disclose a method in which a magnetic recording medium is heated by using near-field light generated from a near-field light generator that is a conductive plate, so-called a plasmon antenna.

However, when such a plasmon antenna is used to implement thermally-assisted magnetic recording, a difficult problem could arise as described below.

While a plasmon antenna converts the received light to near-field light as described above, it is known that the light use efficiency is not so high; most part of the applied light changes to thermal energy in the plasmon antenna. Here, the size of the plasmon antenna is set to a value less than or equal to the wavelength of the light, thus its volume is very small. Accordingly, the thermal energy heats the plasmon antenna to an extremely high temperature; in some cases, the temperature of the plasmon antenna reaches approximately 500° C. (degrees Celsius). Such temperature rise causes the plasmon antenna to thermally expand and protrude from the opposed-to-medium surface toward a magnetic recording medium. As a result, the end, which reaches the opposed-to-medium surface, of a read head element for reading data signal or servo signal from the magnetic recording medium can become relatively far apart from the magnetic recording medium. If this is the case, it will be difficult to properly read the servo signal during writing in which the plasmon antenna is used to irradiate the magnetic recording medium with near-field light. In addition, the electrical resistance of the plasmon antenna increases to a considerably high value at such extremely high temperature. This means that the light use efficiency of the plasmon antenna described above can be further degraded because of increased thermal disturbance of free electrons in the plasmon antenna.

Another problem could arise in the case of combining the plasmon antenna and the main magnetic pole of a write head element. In a thermally-assisted magnetic recording, a plasmon antenna must be disposed sufficiently close to a main magnetic pole, whether on the trailing side or on the leading side of the main magnetic pole. Actually, the thermally-assisted magnetic recording that uses the plasmon antenna applies thermal-dominant technique in which spatial resolution of record bits depends on the spot diameter of near-field light. Therefore, temperature gradient adjacent to the irradiating center of near-field light becomes significantly large. While, magnetic-field gradient of write field generated from the main magnetic pole is set to be considerably large according to the higher recording density. As a result, in writing record bits, the irradiating center of near-field light, or the plasmon antenna, is required to be sufficiently close to the main magnetic pole in order to obtain write field with sufficient intensity near the irradiating center.

However, the plasmon antenna generates near-field light by receiving light that has propagated through a waveguide structure. The waveguide structure generally consists of a core region having a high refractive index and a clad region having a lower refractive index which surrounds the core region. To keep function as the waveguide, the thickness of each region is set comparable with the wavelength of the light. As a result, it is difficult that the plasmon antenna, which is provided so as to be opposed to the core region at the end on the opposed-to-medium surface side of the waveguide structure, is disposed sufficiently close to the main magnetic pole with a distance less than the wavelength of the light.

From above-described considerations, a thermally-assisted magnetic recording without using a near-field light generator such as a plasmon antenna is expected. For example, U.S. Pat. No. 6,636,460 B2 discloses a magnetic recording apparatus in which a semiconductor light-emitting element is provided on the leading side of the main magnetic pole instead of a plasmon antenna. The apparatus heats a portion of the magnetic recording medium by laser light spot generated from the semiconductor light-emitting element to lower coercive force of the portion. Then, recording is performed by applying magnetic field generated from the main magnetic pole to the portion with lowered coercive force. In the recording, a reversing point of magnetization in which the intensity of coercive force is equal to the intensity of write field is set in the magnetic pole region; thus, the recording is performed by positively utilizing the temperature gradient instead of the magnetic field gradient.

However, it is difficult to realize a satisfying thermally-assisted magnetic recording by just using a laser light spot with a large diameter. For example, in the case that the laser light spot is located on the leading side of the main magnetic pole, the magnetization transition of record bits is eventually decided under the condition that both of the temperature and magnetic field gradients are small. Therefore, it becomes very difficult to achieve a high linear recording density. While, in the case that the laser light spot is located on the trailing side of the main magnetic pole, record bits may be damaged, because the magnetization transition regions of record bits, which have once been decided, are disturbed by being exposed to higher temperature after the decision.

Further, even in the case of utilizing the laser light spot with a large diameter, a sufficient intensity of write field must be applied to the center of the laser light spot and its neighborhood in order to write record bits. For this purpose, the core region of the waveguide structure is needed to be sufficiently close to the main magnetic pole. Here, the present inventors are currently developing a writing method in which the distance between a main magnetic pole and a trailing shield that is placed on the trailing side from the main magnetic pole is set to be sufficiently small, and writing is performed by using a steep magnetic-field gradient that exists near the edge positioned on the opposed-to-medium surface and on the trailing side of the main magnetic pole. Therefore, the center of the laser light spot of the waveguide structure located on the leading side from the main magnetic pole is required to be much closer to the edge on the trailing side of the main magnetic pole; thus the distance between the waveguide structure and the main magnetic pole must be much smaller.

However, the smaller distance between the core region and the main magnetic pole is equivalent to a significantly thinner clad region or to the removal of the clad region. This may cause a problem that the light propagating through the core region can be easily absorbed into the main magnetic pole. The light propagating through the core region should reach the magnetic recording medium with a loss as low as possible to realize a satisfying thermally-assisted magnetic recording. Therefore, this absorption must be avoided as much as possible.

SUMMARY OF THE INVENTION

Some terms used in the specification will be defined before explaining the present invention. In a layered structure or an element structure formed in the element-formation surface of a slider substrate of the magnetic recording head according to the present invention, when viewed from a standard layer or element, a substrate side is defined as “lower” side, and the opposite side as an “upper” side. Further, “X-, Y- and Z-axis directions” are indicated in some figures showing embodiments of the head according to the present invention as needed. Here, Z-axis direction indicates above-described “up-and-low” direction, and +Z side corresponds to the trailing side and −Z side to the leading side. And Y-axis direction indicates the track width direction, and X-axis direction indicates the height direction.

According to the present invention, a thermally-assisted magnetic recording head is provided, which comprises,

a waveguide for guiding a light for thermal-assist to a magnetic recording medium, formed in an element-formation surface of a substrate and extending to an opposed-to-medium surface of the head; and

a write head element formed on a trailing side from the waveguide and comprising: a main magnetic pole for applying a write magnetic field to the magnetic recording medium; and an auxiliary magnetic pole provided on a trailing side of the main magnetic pole.

Further, in the thermally-assisted magnetic recording head, the main magnetic pole comprises: a main pole tip extending to the opposed-to-medium surface; and a main pole body provided on an end portion of the main pole tip, the end portion being on an opposite side to the opposed-to-medium surface. And a groove is provided in an upper surface of the waveguide, at least a portion of the main pole tip is embedded in the groove, and a portion of a first clad layer that acts as a clad with respect to the propagation of the light is sandwiched between the at least a portion of the main pole tip and the groove. Further, a second clad layer that acts as a clad for propagation of the light is provided on the first clad layer and on a rear side from the main pole tip when viewed from the opposed-to-medium surface side.

In the thermally-assisted magnetic recording head, the absorption of the light propagating through the waveguide by the main magnetic pole can be sufficiently suppressed by applying the above-described configuration of the first and second clad layers. Further, in addition, there can become sufficiently small the distance between the light spot center of the waveguide and the main magnetic pole by applying the configuration in which at least a portion of the main pole tip is embedded in the groove provided in the waveguide. As a result, there can be formed stable record bits pattern having steep magnetization transition regions, without depending on the use of a near-field light generator. Thus, satisfying thermally-assisted magnetic recording can be realized.

In the head according to the present invention, the main pole tip preferably has a width in a track width direction smaller than that of the main pole body. And the main pole tip preferably comprises a first tip portion extending to the opposed-to-medium surface and a second tip portion provided on the first tip portion, an upper surface of the first tip portion and an upper surface of the first clad layer being planarized to be substantially in one plane. Further, a light source for emitting the light for thermal-assist is preferably provided on or near an end surface of the waveguide on an opposite side to the opposed-to-medium surface. Furthermore, an end portion on the opposed-to-medium surface side of the second tip portion is preferably tapered in a stacking direction in such a way that an inclined surface reaching the opposed-to-medium surface is provided on a trailing side of the end portion. By applying the tapered structure, the trailing edge MPE as a writing position can be provided closer to the light spot center of the waveguide, under the condition that the second tip portion keeps a sufficient volume for acting as a magnetic path.

Further, in the magnetic recording head according to the present invention, an embedding amount that is a distance between an upper surface of the waveguide and a bottom surface of the main pole tip embedded in the waveguide is preferably less than 30% of a thickness of the waveguide, and more preferably 20% or less of a thickness of the waveguide. This setting of the embedding amount can secure the existence of a waveguide mode in the waveguide. Further, a length of the at least a portion of the main pole tip that is embedded in the groove is 3 μm (micrometers) or more, and 4 μm or less, the length being in a direction perpendicular to the opposed-to-medium surface.

Further, in the magnetic recording head according to the present invention, a third clad layer is preferably provided between the second clad layer and the main pole body. In the case, an end of the third clad layer on the opposed-to-medium surface side is preferably recessed by a predetermined distance from an end of the main pole tip when viewed from the opposed-to-medium surface side, the end of the main pole tip being on an opposite side to the opposed-to-medium surface. Here, the predetermined distance is preferably 1 μm or more, and 2 μm or less.

Further, in the thermally-assisted magnetic recording head according to the present invention, it is preferable that an effective write field profile has a protruded portion on a trailing side, the effective write field profile being an intensity distribution of write magnetic field generated from the main pole tip, with respect to positions along a track in a recording layer of the magnetic recording medium, and that an anisotropic field profile traverses the protruded portion of the effective write field profile, the anisotropic field profile being a distribution of anisotropic magnetic field with respect to positions along a track in the recording layer when a portion of the recording layer is irradiated directly with light emitted from the waveguide; thus an anisotropic magnetic field of the portion is decreased. Further, in this case, a minimum value H_(MIN) of anisotropic magnetic field in the anisotropic field profile preferably satisfies a condition: HK_(MIN)>EH_(MIN), where EH_(MIN) is a minimum value of write magnetic field in a range between both edges of the write field profile.

According to the present invention, a head gimbal assembly (HGA) is further provided, which comprises a suspension and the above-described thermally-assisted magnetic recording head fixed on the suspension.

According to the present invention, a magnetic recording apparatus is further provided, which comprises at least one HGA described above; at least one magnetic recording medium; and a recording circuit for controlling write operations which the thermally-assisted magnetic recording head performs to the magnetic recording medium, the recording circuit further comprising a light-emission control circuit for controlling operations of emitting the light. Here, a light source is preferably provided which supplies the light for thermal-assist to an end surface of the waveguide on an opposite side to the opposed-to-medium surface.

According to the present invention, a manufacturing method of a thermally-assisted magnetic recording head is further provided, which comprises steps of:

forming a first clad layer that acts as a clad for propagation of a light on a waveguide that acts as a core for propagation of the light;

forming a first etching mask pattern with a predetermined shape on the first clad layer; then forming a groove extending into the waveguide in an upper surface of the first clad layer by performing an etching with the first etching mask pattern as a mask;

forming an insulating film that is to be a portion of the first clad layer on the wall surface of the groove so that the upper surface including the groove of the waveguide is covered with the first clad layer;

depositing a magnetic film in such a way that the groove is filled with the magnetic film, then performing a polishing or etching so as to remove the first etching mask pattern, thereby an upper surface of the magnetic film and an upper surface of the first clad layer being planarized to be substantially in one plane; thus forming a first tip portion of the main pole tip;

forming a second tip portion on the first tip portion, then forming a second etching mask pattern with a predetermined shape in such a way that the second etching mask pattern at least covers the second tip portion except a portion to be an end portion on the opposed-to-medium surface side of the second tip portion, then forming an inclined surface in the portion to be the end portion on the opposed-to-medium surface side of the second tip portion, by performing an etching with the second etching mask pattern as a mask; and

after that, forming the first tip portion embedded in the groove of the waveguide and the second tip portion tapered in a stacking direction in such a way that the inclined surface reaching the opposed-to-medium surface is provided, by forming the opposed-to-medium surface with use of a polishing as a height process.

By using the above-described manufacturing method, there can be manufactured a thermally-assisted magnetic recording head in which the absorption of the light propagating through the waveguide by the main magnetic pole can be sufficiently suppressed, while the distance between the light spot center of the waveguide and the main magnetic pole can be sufficiently small.

Further, in the step of forming the insulating film to be a portion of the first clad layer on the wall surface of the groove, a width in a track width direction at the position to be the opposed-to-medium surface in the groove in which the insulating film is deposited on the wall surfaces opposed to each other is preferably set to be a width desired as a width of the main pole tip. Further, after the inclined surface is formed in the end portion of the second tip portion to be near the opposed-to-medium surface, a gap layer is preferably formed by depositing an insulating film in such a way that at least the inclined surface is covered with the insulating film, then an upper surface of the end portion of the second tip portion opposite to the inclined surface is preferably exposed by performing an etching, after that, preferably formed is a trailing shield that covers at least the gap layer formed on the inclined surface and a main pole body that covers at least the exposed upper surface of the second tip portion.

Further objects and advantages of the present invention will be apparent from the following description of preferred embodiments of the invention as illustrated in the accompanying figures. In each figure, the same element as an element shown in other figure is indicated by the same reference numeral. Further, the ratio of dimensions within an element and between elements becomes arbitrary for viewability.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a perspective view schematically illustrating a structure of a major part in one embodiment of a magnetic recording apparatus and an HGA according to the present invention;

FIG. 2 shows a perspective view illustrating one embodiment of thermally-assisted magnetic recording head according to the present invention;

FIG. 3 shows a cross-sectional view taken by plane A in FIG. 2, schematically illustrating a main part of the thermally-assisted magnetic recording head according to the present invention;

FIG. 4 a shows a cross-sectional view taken by plane A in FIG. 2, schematically illustrating a main part of the waveguide and the electromagnetic transducer in one embodiment of the thermally-assisted magnetic recording head according to the present invention;

FIG. 4 b shows a cross-sectional view taken by plane A in FIG. 2, schematically illustrating a main part of another embodiment regarding the waveguide, the main magnetic pole layer and their vicinity;

FIG. 5 shows a top view and a perspective view schematically illustrating the structure of the main magnetic pole layer;

FIG. 6 a shows a perspective view illustrating one embodiment of the waveguide;

FIG. 6 b shows a plain view illustrating shapes of the ends of electromagnetic transducer and waveguide in the head part end surface;

FIGS. 7 a and 7 b show schematic views illustrating effective write field profiles and anisotropic field profiles in comparative examples, in which thermally-assisted magnetic recording is implemented by using a supplier of laser light with a large spot diameter, such as a waveguide;

FIG. 8 shows a schematic view for explaining an effective write field profile having a protruded portion on the trailing side according to the present invention;

FIGS. 9 a and 9 b show schematic views illustrating effective write field profiles and anisotropic field profiles, for explaining the principle of the thermally-assisted magnetic recording according to the present invention;

FIG. 10 shows a schematic view illustrating anisotropic field profiles, for explaining the setting of the embedding amount D_(EMB) of the first tip portion into the groove;

FIGS. 11 a to 11 m 2 show schematic views illustrating one embodiment of processes to form the waveguide having the groove, the main magnetic pole layer, the trailing shield and their surrounding structures in the manufacturing method of the thermally-assisted magnetic recording head according to the present invention;

FIG. 12 shows a cross-sectional view taken by YZ plane, illustrating the configuration of simulation system used in the present practical examples;

FIG. 13 shows a graph illustrating the simulation result of the transmittance of laser light in the waveguide; and

FIG. 14 shows a schematic view illustrating a main part of the head used in the comparative example.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

FIG. 1 shows a perspective view schematically illustrating a structure of a major part in one embodiment of a magnetic recording apparatus and an HGA according to the present invention. Here, in the perspective view of the HGA, the side of the HGA opposed to the surface of the magnetic recording medium is presented as the upper side.

A magnetic disk apparatus as a magnetic recording apparatus shown in FIG. 1 includes: a plurality of magnetic disks 10 as magnetic recording media, rotating around a rotational axis of a spindle motor 11; an assembly carriage device 12 provided with a plurality of drive arms 14 thereon; a head gimbal assembly (HGA) 17 attached on the top end portion of each drive arm 14 and provided with a thermally-assisted magnetic recording head 21 as a thin-film magnetic head; and a recording/reproducing and light-emission control circuit 13 for controlling write/read operations of the thermally-assisted magnetic recording head 21 and further for controlling the emission operation of a laser diode as a light source that generates laser light for thermally-assisted magnetic recording, which will be described later.

In the present embodiment, the magnetic disk 10 is designed for perpendicular magnetic recording, and has a structure in which sequentially stacked on a disk substrate is: a soft-magnetic under layer; an intermediate layer; and a magnetic recording layer (perpendicular magnetization layer). The assembly carriage device 12 is a device for positioning the thermally-assisted magnetic recording head 21 above a track formed on the magnetic recording layer of the magnetic disk 10, on which record bits are aligned. In the apparatus, the drive arms 14 are stacked in a direction along a pivot bearing axis 16 and can be angularly swung around the axis 16 by a voice coil motor (VCM) 15. The structure of the magnetic disk apparatus according to the present invention is not limited to that described above. For instance, the number of each of magnetic disks 10, drive arms 14, HGAs 17 and thermally-assisted magnetic recording heads 21 may be single.

Referring also to FIG. 1, a suspension 20 in the HGA 17 includes a load beam 200, a flexure 201 with elasticity fixed to the load beam 200, and a base plate 202 provided on the base portion of the load beam 200. Further, on the flexure 201, there is provided a wiring member 203 that is made up of lead conductors and connection pads electrically joined to both ends of the lead conductors. The thermally-assisted magnetic recording head 21 is fixed to the flexure 201 at the top end portion of the suspension 20 so as to face the surface of each magnetic disk 10 with a predetermined spacing (flying height). Moreover, one ends of the wiring member 203 are electrically connected to terminal electrodes of the thermally-assisted magnetic recording head 21.

The structure of the suspension 20 is not limited to the above-described one. An IC chip for driving the head may be mounted midway on the suspension 20, though not shown.

FIG. 2 shows a perspective view illustrating one embodiment of thermally-assisted magnetic recording head 21 according to the present invention.

As shown in FIG. 2, a thermally-assisted magnetic recording head 21 is constituted of the slider 22 and the light source unit 23. The slider 22 includes: a slider substrate 220 formed of, for example, AlTiC (Al₂O₃—TiC), and having an air bearing surface (ABS) 2200 processed so as to provide an appropriate flying height; and a head part 221 formed on an element-formation surface 2202 perpendicular to the ABS 2200. While, the light source unit 23 includes: a unit substrate 230 formed of, for example, AlTiC (Al₂O₃—TiC), and having an joining surface 2300; and a laser diode 40 as a light source provided on a source-installation surface 2302 perpendicular to the joining surface 2300. The slider 22 and the light source unit 23 are bonded to each other in such a way that the back surface 2201 of the slider substrate 220 and the joining surface 2300 of the unit substrate 230 have a surface contact with each other. Here, the back surface 2201 of the slider substrate 220 is defined as an end surface opposite to the ABS 2200 of the slider substrate 220.

In the slider 22, the head part 221 formed on the element-formation surface 2202 of the slider substrate 220 includes: a head element 32 constituted of a magnetoresistive (MR) element 33 for reading data from the magnetic disk and an electromagnetic transducer 34 for writing data to the magnetic disk; a waveguide 35 for guiding laser light generated from the laser diode 40 provided in the light source unit 23 to the opposed-to-medium surface side; an overcoat layer 38 formed on the element-formation surface 2202, so as to cover the MR element 33, the electromagnetic transducer 34 and the waveguide 35; a pair of terminal electrodes 370 exposed in the upper surface of the overcoat layer 38 and electrically connected to the MR element 33; and a pair of terminal electrodes 371 also exposed in the upper surface of the overcoat layer 38 and electrically connected to the electromagnetic transducer 34. The terminal electrodes 370 and 371 are electrically connected to the connection pads of the wiring member 203 provided on the flexure 201 (FIG. 1).

One ends of the MR element 33, the electromagnetic transducer 34 and the waveguide 35 reach (extend to) the head part end surface 2210, which is an opposed-to-medium surface of the head part 221. The head part end surface 2210 and the ABS 2200 constitute the whole opposed-to-medium surface of the thermally-assisted magnetic recording head 21. During actual write and read operations, the thermally-assisted magnetic recording head 21 aerodynamically flies above the surface of the rotating magnetic disk with a predetermined flying height. Thus, the ends of the MR element 33 and electromagnetic transducer 34 face the surface of the magnetic recording layer of the magnetic disk with an appropriate magnetic spacing. Then, the MR element 33 reads data by sensing signal magnetic field from the magnetic recording layer, and the electromagnetic transducer 34 writes data by applying signal magnetic field to the magnetic recording layer. When writing data, a portion of the magnetic recording layer is irradiated to be heated with laser light (waveguide light) propagating from the laser diode 40 of the light source unit 23 through the waveguide 35. As a result, the anisotropic magnetic field of the portion is decreased to a value that enables writing. Then, thermally-assisted magnetic recording is accomplished by applying write magnetic field (write field) to the portion with decreased anisotropic magnetic field of the magnetic recording layer.

In the instance, the waveguide 35 is provided between the MR element 33 and the electromagnetic transducer 34, that is, on the leading side (−Z side) of the electromagnetic transducer 34. By applying the special configuration of the electromagnetic transducer 34 and its vicinity including the arrangement of the waveguide 35, the head according to the present invention can realize satisfying thermally-assisted magnetic recording suitable for higher recording density, without depending on the use of a near-field light generator for emitting near-field light. Alternatively, the thermally-assisted magnetic recording head 21 may have a configuration in which the laser diode 40 is directly mounted on the slider 22 instead of using the light source unit 23.

FIG. 3 shows a cross-sectional view taken by plane A in FIG. 2, schematically illustrating a main part of the thermally-assisted magnetic recording head 21.

As shown in FIG. 3, the MR element 33 is formed on the insulating layer 380 stacked on the element-formation surface 2202, and includes: an MR multilayer 332; and a lower shield layer 330 and an upper shield layer 334 which sandwich the MR multilayer 332 and the insulating layer 381 therebetween. The upper and lower shield layers 334 and 330 prevent the MR multilayer 332 from receiving external magnetic field as a noise. The MR multilayer 332 is a magneto-sensitive part for detecting signal magnetic field by using MR effect. The MR multilayer 332 may be, for example: a current-in-plane giant magnetoresistive (CIP-GMR) multilayer that utilizes CIP-GMR effect; a current-perpendicular-to-plane giant magnetoresistive (CPP-GMR) multilayer that utilizes CPP-GMR effect; or a tunnel magnetoresistive (TMR) multilayer that utilizes TMR effect. The MR multilayer 332 that utilizes any MR effect described above can detect signal magnetic field from the magnetic disk with high sensitivity. In the case that the MR multilayer 332 is a CPP-GMR multilayer or a TMR multilayer, the upper and lower shield layers 334 and 330 act as electrodes.

Also as shown in FIG. 3, the electromagnetic transducer 34 is designed for perpendicular magnetic recording, and includes a main magnetic pole layer 340, a gap layer 341, a write coil layer 343, a coil insulating layer 344, and a write shield layer 345.

The main magnetic pole layer 340 acts as a magnetic path for converging and guiding a magnetic flux toward the magnetic recording layer (perpendicular magnetization layer) of the magnetic disk, the magnetic flux being excited by write current flowing through the write coil layer 343. The main magnetic pole layer 340 includes a main pole tip 3400 and a main pole body 3401. One end of the main pole tip 3400 reaches the head part end surface 2210, and at least a portion of the main pole tip 3400 is embedded in a groove 3540 provided in the upper surface 354 (FIG. 6 a) of the waveguide, described later. As a result, the distance between the light spot center 3500 (FIG. 6 b) of the waveguide 35 and the main pole tip 3400 can be set sufficiently small.

Further, the main pole body 3401 is provided on the end portion of the main pole tip 3400, the end portion being on the opposite side to the head part end surface 2210. Thus, the main pole body 3401 is magnetically coupled with the main pole tip 3400. Both of the main pole tip 3400 and the main pole body 3401 are preferably formed of a soft-magnetic material, for example, of an iron alloy containing Fe as a main component, such as FeNi, FeCo, FeCoNi, FeN or FeZrN. Further, the main pole tip 3400 preferably has a saturation magnetic flux density equal to or higher than that of the main pole body 3401.

The gap layer 341 forms a gap for separating the main magnetic pole layer 340 from the write shield layer 345 in the region near the head part end surface 2210. The gap layer 341 is formed, for example, of a non-magnetic insulating material such as Al₂O₃ (alumina), SiO₂ (silicon dioxide), AlN (aluminum nitride) or DLC, or formed of a non-magnetic conductive material such as Ru (ruthenium). The thickness of the gap layer 341 determines the distance between the main magnetic pole layer 340 and the write shield layer 345, and is, for example, in the range of approximately 0.01 to 0.5 μm. The write coil layer 343 is formed on an insulating layer 3421 made of an insulating material such as Al₂O₃ (alumina), in such a way as to pass through in one turn at least between the main magnetic pole layer 340 and the write shield layer 345, and has a spiral structure with a back contact portion 3402 as a center. The write coil layer 343 is formed of a conductive material such as Cu (copper). The write coil layer 343 is covered with a coil insulating layer 344 that is made of an insulating material such as a heat-cured photoresist and electrically isolates the write coil layer 343 from the main magnetic pole layer 340 and the write shield layer 345. The write coil layer 343 has a monolayer structure in the present embodiment, however, may have a two or more layered structure or a helical coil shape. Further, the number of turns of the write coil layer 343 is not limited to that shown in FIG. 3, and may be, for example, in the range from two to seven.

The write shield layer 345 is an auxiliary magnetic pole that reaches the head part end surface 2210, and acts as a magnetic path for the magnetic flux returning from a soft-magnetic under layer that is provided under the magnetic recording layer of the magnetic disk. The thickness of the write shield layer 345 is, for example, approximately 0.5 to 5 μm. Further, the write shield layer 345 has a trailing shield 3450 that is a portion opposed to the main magnetic pole layer 340. The trailing shield 3450 also extends to the head part end surface 2210, and acts for receiving the magnetic flux spreading from the main magnetic pole layer 340. In the present embodiment, the trailing shield 3450 is planarized together with the insulating layer 3420 and the main pole body 3401, and has a width in the track width direction larger than the width of the main pole body 3401 as well as than the main pole tip 3400. This trailing shield 3450 causes the magnetic-field gradient between the end portion of the trailing shield 3450 and the main pole tip 3400 to become steeper. As a result, the jitter of signal output becomes smaller; therefore, error rates during read operation can be reduced. The write shield layer 345 is formed of a soft-magnetic material. Especially, the trailing shield 3450 is formed of a material with high saturation magnetic flux density such as NiFe (Permalloy) or is formed of such an iron alloy as the main pole tip 3400 is formed of.

Referring to FIG. 3, the waveguide 35 is located between the MR element 33 and the electromagnetic transducer 34, and is formed on an insulating layer 383 that plays a role of a clad for the laser light (waveguide light) propagating through the waveguide 35. Further, the waveguide 35 is placed in parallel with the element-formation surface 2202, and extends, from an rear-end surface 352 that reaches the head part end surface 2211 opposite to the ABS 2200, to an end surface 350 that reaches the head part end surface 2210. On the upper surface 354 (FIG. 6 a) of the waveguide 35, there is provided a groove 3540. Here, at least a portion of the main pole tip 3400 is embedded in the groove 3540, and further, a portion of a first clad layer 384, which acts as a clad with respect to the propagation of the waveguide light, is sandwiched between the portion of the tip 3400 and the groove 3540. This configuration can set the distance between the light spot center 3500 (FIG. 6 b) of the waveguide 35.and the main pole tip 3400 to be sufficiently small. As a result, as described in detail later, there can be formed stable record bits pattern having steep magnetization transition regions, without depending on the use of a near-field light generator. A detailed explanation about the configuration and structures of the waveguide 35, the main pole tip 3400 and main pole body 3401 according to the present invention will be given later with reference to FIG. 4 a.

Further, as is in the present embodiment, an inter-element shield layer 39 is preferably provided between the MR element 33 and the electromagnetic transducer 34 (waveguide 35), sandwiched between the insulating layers 382 and 383. The inter-element shield layer 39 may be formed of a soft-magnetic material, and plays a role for shielding the MR element 33 from the magnetic field generated from the electromagnetic transducer 34. Further, though not shown in the figure, a backing coil portion may be provided between the inter-element shield layer 39 and the waveguide 35 to suppress wide adjacent track erasure (WATE) phenomenon.

Also according to FIG. 3, the light source unit 23 includes: a unit substrate 230; a laser diode 40 provided on the source-installation surface 2302 of the unit substrate 230; a terminal electrode 410 electrically connected to a p-electrode 40 i of the laser diode 40; and a terminal electrode 411 electrically connected to an n-electrode 40 a of the laser diode 40. The terminal electrodes 410 and 411 are electrically connected to the connection pads of the wiring member 203 provided on the flexure 201 (FIG. 1). By applying a predetermined voltage between the electrodes 410 and 411 of the laser diode 40, laser light is emitted from the emission center 4000 on an emission surface 400 of the laser diode 40.

A light source such as InP base, GaAs base or GaN base diode can be utilized as the laser diode 40, which is usually used for, for example, communication, optical disk storage or material analysis. Here, the thermally-assisted magnetic recording head 21 according to the present invention heats a magnetic recording medium without depending on the use of a near-field light generator. Therefore, there is no restriction on usable wavelength of the laser light which depends on the kind of constituent material of the near-field light generator. This extends the range of the choices for wavelength λ_(L) of the emitted laser light. Actually, the wavelength λ_(L) may be, for example, in the range of approximately 375 nm (nanometers) to 1.7 μm. Specifically, for example, a laser diode of InGaAsP/InP quaternary mixed crystal can also be used, in which possible wavelength region is set to be from 1.2 to 1.67 μm. In the present embodiment, the laser diode 40 has a multilayered structure including an n-electrode 40 a, an n-GaAs substrate 40 b, an n-InGaAlP clad layer 40 c, the first InGaAlP guide layer 40 d, an active layer 40 e formed of multiquantum well (InGaP/InGaAlP) or the like, the second InGaAlP guide layer 40 f, an p-InGaAlP clad layer 40 g, p-electrode base layer 40 h, and p-electrode 40 i. On the front and rear cleaved surfaces of the multilayered structure, respectively formed are reflective layers for exciting the oscillation by total reflection. The reflective layer 42 has an opening in the position of the active layer 40 e including the light-emission center 4000. Here, the laser diode 40 may have a thickness T_(LA) of, for example, approximately 60 to 200 μm.

Further, an electric source provided within the magnetic disk apparatus can be used for driving the laser diode 40. In fact, the magnetic disk apparatus usually has an electric source with applying voltage of, for example, approximately 2V, which is sufficient for the laser oscillation. The amount of electric power consumption of the laser diode 40 is, for example, in the order of several tens mW, which can be covered sufficiently by the electric source provided within the magnetic disk apparatus. The laser diode 40 and terminal electrodes 410 and 411 are not limited to the above-described embodiment. For example, the n-electrode 40 a may be fixed to the source-installation surface 2302 of the unit substrate 230 by turning the electrodes of the laser diode 40 upside down. Further, alternatively, the thermally-assisted magnetic recording head 21 may include no laser diode 40; then, the light-emission center of a laser diode provided within the magnetic disk apparatus and the rear-end surface 352 of the waveguide 35 may be connected by using, for example, optical fiber.

Each of the slider 22 and light source unit 23 may have an arbitrary size. For example, the slider 22 may be so-called a femto slider in which the width in the track width direction (Y-axis direction) is 700 μm; the length (in Z-axis direction) is 850 μm; and the thickness (in X-axis direction) is 230 μm. In the case, the light source unit 23 may be one size smaller than the slider 22, for example, in which the width in the track width direction is 425 μm; the length is 300 μm; and the thickness is 300 μm.

By joining the above-described light source unit 23 and slider 22, there is constituted the thermally-assisted magnetic recording head 21. In the joining, the joining surface 2300 of the unit substrate 230 is made to have a surface contact with the back surface 2201 of the slider substrate 220. Then, the locations of the unit substrate 230 and the slider substrate 220 are determined in such a way that the laser light generated from the laser diode 40 can directly enter the waveguide 35 through the rear-end surface 352 opposite to the ABS 2200 of the waveguide 35.

FIG. 4 a shows a cross-sectional view taken by plane A in FIG. 2, schematically illustrating a main part of the waveguide 35 and the electromagnetic transducer 34 in one embodiment of the thermally-assisted magnetic recording head 21 according to the present invention. And FIG. 4 b shows a cross-sectional view taken by plane A in FIG. 2, schematically illustrating a main part of another embodiment regarding the waveguide 35, the main magnetic pole layer 340 and their vicinity. Further, FIG. 5 shows a top view and a perspective view schematically illustrating the structure of the main magnetic pole layer 340.

As shown in FIG. 4 a, the main magnetic pole layer 340 of the electromagnetic transducer 34 is provided on the trailing side (+Z side) from the waveguide 35, for applying write field to the magnetic recording layer of the magnetic disk. The write shield layer 345 is provided on the trailing side from the main magnetic pole layer 340. As described above, the main magnetic pole layer 340 includes: a main pole tip 3400 reaching the head part end surface 2210; and a main pole body 3401 provided on the end portion of the main pole tip 3400, the end portion being on the opposite side to the head part end surface 2210. Further, the main pole tip 3400 includes: a first tip portion 3400A reaching the head part end surface 2210; and a second tip portion 3400B provided on the first tip portion 3400A.

Furthermore, as described above, on the upper surface 354 (FIG. 6 a) of the waveguide 35, there is provided a groove 3540. And at least a portion of the main pole tip 3400, that is the first tip portion 3400A in the present embodiment, is embedded in the groove 3540, a portion of a first clad layer 384, which acts as a clad with respect to the propagation of the waveguide light, being sandwiched between the first tip portion 3400A and the groove 3540. Here, the upper surfaces of the first tip portion 3400A and the first clad layer 384 are planarized in such a way as to be substantially in one plane. Therefore, the volume of the first tip portion 3400A as a magnetic path becomes small; however, by stacking the second tip portion 3400B on the first tip portion 3400A, the main pole tip holds a volume required for acting as a waveguide, and preserves the writing ability.

Further, the magnetic-field gradient of write field becomes sufficiently large at a trailing edge MPE and its vicinity of the end surface 3400 e of the main pole tip 3400 as described in detail later, under the configuration of the thermally-assisted magnetic recording head 21. Thus, the trailing edge MPE is exactly a position for writing data. Here, by embedding the first tip portion 3400A in the groove 3540, the distance D_(MWE) between the light spot center 3500 of the waveguide 35 and the trailing edge MPE can be set to be sufficiently small. As a result, during writing record bits, a sufficient intensity of write field can be applied from the trailing edge MPE of the main pole tip 3400 to the intensity center and its vicinity of the laser light spot with which the magnetic recording layer of the magnetic disk is irradiated, the laser light being emitted from the end surface 350 of the waveguide 35. Therefore, there can be formed stable record bits pattern having steep magnetization transition regions.

Further, in the present embodiment, the end portion of the second tip portion 3400B on the head end surface 2210 side is tapered in the stacking direction (Z-axis direction), in such a way that an inclined surface 3400 a reaching the end surface 2210 is provided on the trailing side (+Z side) of the end portion. Here, the trailing edge MPE is also an edge of the inclined surface 3400 a; thus, is positioned more on the leading side (−Z side) than it would be in the case without the inclined surface 3400 a. As a result, the trailing edge MPE as a writing position can be provided closer to the light spot center 3500 of the waveguide 35, under the condition that the second tip portion 3400B (main pole tip 3400) keeps a sufficient volume for acting as a magnetic path.

Alternatively, the main pole tip 3400 may have a multilayered structure with three layers or more, and the bottom (lowest) layer may be embedded in the groove 3540. Further, the top (highest) layer or a plurality of layers from the top may be tapered toward the head part end surface 2210 in the stacking direction (Z-axis direction), in such a way that an inclined surface is provided.

The range of the region where the waveguide 35 and the first tip portion 3400A are opposed to each other in the groove 3540 is limited to the length L_(MP1) of the first tip portion 3400A in the direction perpendicular to the head part end surface 2210. Further, a second clad layer 50, which also acts as a clad, is provided on the first clad layer 384, and on the rear side (+X side) from the main pole tip 3400 (second tip portion 3400B) when viewed from the head part end surface 2210 side. As a result, the other portion of the waveguide 35, which is not opposed to the first tip portion 3400A, extends along with a clad having sufficient thickness, the clad including at least the first clad layer 384 and the second clad layer 50. Therefore, the clad fulfills its function; thus, there can be suppressed the increase of propagation loss of laser light propagating through the waveguide 35. Further, the absorption of the waveguide light propagating through the waveguide 35 by the main magnetic pole layer 340 can sufficiently be suppressed. Here, the thickness T_(CL2) of the second clad layer 50 can be set to be equal to the thickness T_(MPB) of the second tip portion 3400B, and is preferably 0.05 μm or more, and preferably 0.25 μm or less.

The length L_(MP1) of the main pole tip 3400 (first tip portion 3400A) is preferably 3 μm or more. This is because: the main pole tip 3400 needs to have a substantial length of at least 2 μm in order to generate a sufficient intensity of write field, and additionally, the coupling region between the main pole tip 3400 and the main pole body 3401 needs to have a length of at least 1 μm in order to obtain sufficient magnetic coupling. Further, the length L_(MP1) is preferably 4 μm or less. This is because: by setting L_(MP1) to be 4 μm or less, the region where the waveguide 35 are opposed to the main pole tip 3400 becomes smaller, the region having a clad with less adequate thickness; thus, there can be sufficiently suppressed the absorption of the waveguide light propagating through the waveguide 35 by the first tip portion 3400A. That is, by shortening the length (pole height) L_(MP1) of the main pole tip 3400 (first tip portion 3400A) and providing the second clad layer 50 on the rear side (+X side) from the main pole tip 3400 (second tip portion 3400B), the absorption of laser light by the main magnetic pole layer 340 can be kept to a minimum.

Further, the thickness T_(CL1) of the first clad layer 384 is preferably in the range from 10 nm and 100 nm, and may be set, for example, to be 50 nm. This setting of the thickness T_(CL1) enables the first clad layer 384 to function as a clad and provides a sufficiently small distance D_(MWE) between the light spot center 3500 and the trailing edge MPE.

Furthermore, as detailed later, the embedding amount D_(EMB) is preferably less than 30% of the thickness T_(WG) (FIG. 6 a) of the waveguide 35. Here, the embedding amount D_(EMB) is defined as a distance between the upper surface 354 of the waveguide 35 and the lower (bottom) surface 3400 g of the first tip portion 3400A embedded in the groove 3540 of the waveguide 35.

Further in the present embodiment, as shown in FIG. 4 a, a third clad layer 51 acting as a clad for the waveguide light propagating through the waveguide 35 is provided between the second clad layer 50 and the main pole body 3401. By adding the third clad layer 51, the waveguide light propagating through the waveguide 35 can receive a more sufficient clad function, and there can be suppressed the increase in propagation loss of the waveguide light more surely. Further, there can be sufficiently suppressed the absorption of the waveguide light by the main pole body 3401. To keep the more sufficient clad function, the third clad layer preferably has a thickness T_(CL3) of at least 0.4 μm.

In the waveguide structure of the present embodiment, the waveguide 35 corresponds to a core, and the insulating layer 383, the first clad layer 384, the second clad layer 50 and the third clad layer 51 to a clad. Here, it is preferable that the total thickness T_(CL1)+T_(CL2)+T_(CL3) of the first to third clad layers 384, 50 and 51 is at least comparable with the wavelength λ_(L) of laser light to be used, the preferable thickness being required to bring a sufficient function of clad. Under the preferable total thickness, almost all portions of the waveguide 35 can secure a clad with sufficient thickness.

Further, the end 510 of the third clad layer 51 on the head part end surface 2210 side is preferably recessed by a distance D_(CL3) from the end 3400 f of the main pole tip 3400 when viewed from the head end surface 2210 side, the end 3400 f being on the opposite side to the end surface 2210. This setting of the distance D_(CL3) can secure a joint area needed for obtaining adequate magnetic coupling between the main pole tip 3400 and the main pole body 3401 during head manufacturing process. That is, there can be avoided a situation in which the formation of the third clad layer 51 limits the magnetic coupling between them. As a result, a sufficient intensity of write field can be generated from the main pole tip 3400. It is known that the distance D_(CL3) is preferably in the range from 1 μm to 2 μm.

Alternatively, as shown in FIG. 4 b, it is possible that the second clad layer 50′ and the main pole body 3401′ directly have a surface contact with each other; thus, an additional clad layer is not provided therebetween. Here, the first tip portion 3400A′ of the main pole tip 3400′ is also embedded in the groove 3540═ provided in the waveguide 35′. In the case, it is preferable that the total thickness T_(CL1)′+T_(CL2)′of the first and second clad layers 384′ and 50′ is at least comparable with the wavelength λ_(L) of laser light to be used, which is needed for sufficient clad function.

According to FIG. 5, the width W_(MP2) in the track width direction (Y-axis direction) of the main pole body 3401 is the same as or more than the width W_(MP1) in the track width direction of the second tip portion 3400B. And a portion of the second tip portion 3400B on the head part end surface 2210 side is tapered in the track width direction (Y-axis direction). Further, a portion on the end surface 2210 side of the first tip portion 3400A has a very small width W_(P) (<W_(MP1)) in the track width direction (Y-axis direction). Whereas, a portion of the first tip portion 3400A on the opposite side to the head part end surface 2210 may have a width W_(PB) larger than the width W_(P) in order to secure a sufficient magnetic coupling by enlarging the contact area with the second tip portion 3400B. As a matter of course, it is also possible that the first tip portion 3400A has a very small width W_(P) at any position in X-axis direction. The significantly small width W_(P) on the end surface 2210 of the main pole tip 3400 (first tip portion 3400A) enables minute write field to be generated, and can make the track width have a very small value corresponding to high recording density. The width W_(P) is, for example, in the range of approximately 0.05 to 0.5 μm.

Further, as shown in FIGS. 4 a and 5, in the present embodiment, the end portion of the main pole tip 3400 (second tip portion 3400B) on the head part end surface 2210 side is tapered in the stacking direction (Z-axis direction), in such a way that an inclined surface 3400 a reaching the end surface 2210 is provided on the trailing side (+Z side) of the end portion. Here, at the trailing edge MPE and its vicinity of the end surface 3400 e of the main pole tip 3400, the magnetic-field gradient of write field is sufficiently large under the configuration of the thermally-assisted magnetic recording head 21, as described in detail later. Thus, the trailing edge MPE is exactly a position for writing data. The trailing edge MPE is also an edge of the inclined surface 3400 a; thus, is positioned more on the leading side (−Z side) than it would be in the case without the inclined surface 3400 a. As a result, by applying the above-described tapered structure having the inclined surface 3400 a, the trailing edge as a writing position can be provided closer to the waveguide 35, under the condition that the main pole tip 3400 keeps a sufficient volume for acting as a magnetic path. Therefore, during writing record bits, a sufficient intensity of write field can be applied from the trailing edge MPE of the main pole tip 3400 to the intensity center and its vicinity of laser light spot with which the magnetic recoding layer of the magnetic disk is irradiated, the laser light being emitted from the end surface 350 of the waveguide 35.

The main pole tip 3400 can be narrowed down to, for example, a half thickness with use of the inclined surface 3400 a, by setting the thickness T_(MPA) of the first tip portion 3400A to be, for example, 0.1 μm and further setting the thickness T_(MPB) of the second tip portion 3400B to be, for example, 0.1 μm. Further, to bring the trailing edge MPE closer to the waveguide 35, T_(MPA)/(T_(MPA)+T_(MPB)) may be set to be 0.5 or less. It is also preferable that, as the present embodiment, the end surface of the trailing shield 3450 is inclined along with the inclined surface 3400 a, and the main pole tip 3400 and the trailing shield 3450 are opposed to each other through a predetermined narrow gap. This configuration causes the magnetic-field gradient of write field near the trailing edge MPE to become steeper.

FIG. 6 a shows a perspective view illustrating one embodiment of the waveguide 35, and FIG. 6 b shows a plain view illustrating shapes of the ends of electromagnetic transducer 34 and waveguide 35 in the head part end surface 2210.

The waveguide 35 may have a rectangular parallelepiped shape extended in X-axis direction; or, as shown in FIG. 6 a, may have a portion that tapers in the track width direction (in Y-axis direction) on the head part end surface 2210 side. The width W_(WG1) in the track width direction (in Y-axis direction) near the rear end surface 352 of the waveguide 35 may be, for example, in the range approximately from 1 to 200 μm, and the width W_(WG2) in the track width direction (in Y-axis direction) near the end surface 350 of the waveguide 35 may be, for example, in the range approximately from 0.3 to 1 μm. The thickness T_(WG) (in Z-axis direction) may be, for example, in the range approximately from 0.1 to 4 μm, and the height H_(WG) (in X-axis direction) may be, for example, in the range approximately from 10 to 300 μm.

Further, as shown in FIGS. 6 a and 6 b, both side surfaces 351 and a lower surface 353 of the waveguide 35 have a surface contact with the insulating layer 383 that acts as a clad. And an upper surface 354, including a groove 3540, of the waveguide 35 has a surface contact with the first clad layer 384. The waveguide 35 is formed, for example, by using a sputtering method, of a dielectric material with higher refractive index n than refractive indexes of the constituent materials of the insulating layer 383, the first clad layer 384, and further the second and third clad layers 50 and 51 (FIG. 4 a). For example, in the case that the insulating layer 383 and the first to third clad layers 384, 50 and 51 are formed of SiO₂ (n=1.5), the waveguide 35 can be formed of, for example, Al₂O₃ (n=1.63). Further, in the case that the insulating layer 383 and the first to third clad layers. 384, 50 and 51 are formed of Al₂O₃ (n=1.63), the waveguide 35 can be formed of, for example, SiO_(X)N_(y) (n=1.7−1.85), Ta₂O₅ (n=2.16), Nb₂O₅ (n=2.33), TiO (n=2.3−2.55) or TiO₂ (n=2.3−2.55). By forming the waveguide 35 of the above-described material, it is possible to reduce the propagation loss of laser light due to excellent optical characteristics of the material. Further, the waveguide 35 acts as a core, while the insulating layer 383 and the first to third clad layers 384, 50 and 51 function as a clad; thus the total reflection condition is satisfied at the side surfaces 351, the lower surface 353 and the upper surface 354. As a result, more amount of laser light 48 can reach the end surface 350, which improves the propagation efficiency of the waveguide 35.

Furthermore, in the upper surface 354 of the waveguide 35, a groove 3540 is provided, and the first tip portion 3400A is embedded in the groove 3540, as described above. Here, the embedding amount D_(EMB) is preferably less than 30% of the thickness T_(WG) of the waveguide 35, as detailed later. The embedding amount D_(EMB) is defined as a distance between the upper surface 354 of the waveguide 35 and the lower (bottom) surface 3400 g of the first tip portion 3400A. The preferable setting of the D_(EMB) enables the increase in propagation loss of waveguide light 48 propagating through the waveguide 35 to be suppressed within the allowable range, under the condition that the distance D_(MWE) on the end surface 2210 between the light spot center 3500 of the waveguide 35 and the trailing edge MPE of the main pole tip 3400 to be set sufficiently small.

Moreover, as shown in FIG. 6 b, on the head part end surface 2210, the end surface 3400 e of the main pole tip 3400 of the electromagnetic transducer 34 is placed on the trailing side (+Z side) from the end surface 350 of the waveguide 35. And, also on the end surface 2210, the end surface 3400 e is fitted in the concave portion as an end of the groove 3540 on the end surface 350, the first clad layer 384 being sandwiched therebetween. Therefore, the main pole tip 3400 (end surface 3400 e) and the waveguide 35 (end surface 350) do not directly have a contact with each other; thereby, there can be suppressed the absorption of waveguide light 48 by the main pole tip 3400.

Here, a distance in Z-axis direction between the spot center 3500 on the end surface 350 of the laser light emitted from the end surface 350 and the trailing edge MPE of the end surface 3400 e of the main pole tip 3400 is defined as D_(MWE). For thermally-assisted magnetic recording of the present invention, it is significantly important to control the positional relation between the distribution of write magnetic field and the distribution of anisotropic magnetic field in the magnetic recording layer of the magnetic disk, by setting D_(MWE) to be a sufficiently small and appropriate value, as described later. The distance D_(MWE) is expressed as:

D _(MWE) =T _(MPA) +D _(CENT) −D _(EMB)   (1)

where D_(CENT) is a distance between the spot center 3500 and the upper surface 354 of the waveguide 35. In this expression, the thickness T_(MPA) of the main pole tip 3400 at the end surface 3400 e can be made sufficiently small by applying the tapered structure having the inclined surface 3400 a in the main pole tip 3400 (the second tip portion 3400B) as shown in FIGS. 4 a and 5. The sufficiently small thickness T_(MPA) allows the distance D_(MWE) to be sufficiently small. Further, suppose that the distance D_(CENT) between the spot center 3500 and the upper surface 354 of the waveguide 35 is determined by providing a groove 3540 with a predetermined depth. In this case, the distance D_(MWE) can be controlled to a smaller value by adjusting the embedding amount D_(EMB) between the upper surface 354 of the waveguide 35 and the lower (bottom) surface 3400 g of the first tip portion 3400A.

Further, the depth D_(GR) of the groove 3540 is expressed as D_(GR)=D_(EMB)+T_(CL1). Here, the thickness T_(CL1) can be made sufficiently small by setting the length L_(MP1) (FIGS. 4 a and 5) of the main pole tip 3400 to be sufficiently small and further by providing the second clad layer on the rear side (+X side) from the main pole tip 3400. Therefore, in the case that a predetermined groove 3540 is formed, it is understood that the embedding amount D_(EMB) can be set to be a sufficiently large value by setting the thickness T_(CL1) to be sufficiently small.

Furthermore, the distance D_(WME) can also be made smaller by controlling the distance D_(CENT) between the spot center 3500 and the upper surface 354 to a smaller value. This control of the distance D_(CENT) can be achieved, for example, by applying a multilayered structure of dielectric materials to the waveguide 35, in which, the upper a layer is, the higher refractive index n the layer has. The multilayered structure can be realized, for example, by sequentially stacking dielectric materials of SiO_(X)N_(y) with changing the composition ratio X and Y appropriately. The number of stacked layers may be, for example, in the range from 8 to 12. In the case that laser light 48 is linearly polarized in Z-axis direction, the above-described multilayered structure enables the spot center 3500 of the laser light 48 in the end surface 350 to be positioned closer to the electromagnetic transducer 34 (trailing edge MPE) in Z-axis direction. Here, it is possible to realize a required value of distance D_(MWE) by selecting the number of layers and the thickness and composition of each layer of the multilayered structure.

As shown in FIG. 6 b, the end surface 3400 e of the main pole tip 3400 has a rectangular (square) shape; alternatively, may have a trapezoidal shape. The above-described width W_(p) in the track width direction (Y-axis direction) of the end surface 3400 is equivalent to the length of the trailing edge MPE where writing data is performed, and determines the width of a track formed on the magnetic recording layer of the magnetic disk. The width W_(p) is, for example, in the range of approximately 0.05 to 0.5 μm.

Hereinafter, there will be explained, with reference to comparative examples, the thermally-assisted magnetic recording according to the present invention, which is implemented by using light emitted from the waveguide 35 and without depending on the use of a near-field light generator.

FIGS. 7 a and 7 b show schematic views illustrating effective write field profiles and anisotropic field profiles in comparative examples, in which thermally-assisted magnetic recording is implemented by using a supplier of laser light with a large spot diameter, such as a waveguide. FIG. 7 a corresponds to the case that a supplier of laser light is positioned on the trailing side from the main magnetic pole 58 of the head, and FIG. 7 b corresponds to the case that a supplier of laser light is positioned on the leading side from the main magnetic pole 58 of the head.

Here, an effective write field profile is defined as the intensity distribution of effective write field with respect to positions along a track in the magnetic recording layer of the magnetic disk. Then, effective write field is a write magnetic field generated from the main magnetic pole, which acts effectively on the magnetic recording layer to write record bits by reversing the magnetization of the layer. Further, an anisotropic field profile is defined as the distribution of anisotropic magnetic field with respect to positions along a track in the magnetic recording layer when a portion of the magnetic recording layer is irradiated with laser light for thermal assist, and anisotropic magnetic field of the portion is decreased. The effective write field profiles and anisotropic field profiles shown in FIGS. 7 a and 7 b are simplistically illustrated; especially, the effective write field profiles will be explained in detail later with reference to FIG. 8.

First, with reference to FIG. 7 a, there will be explained the case that the supplier of laser light is provided on the trailing side from the main magnetic pole 58 of the head. In this case, an anisotropic field profile 61 has a shape of wider valley than an anisotropic field profile of the case of using a near-field light generator. An effective write field profile 60 and the anisotropic field profile 61 are arranged in such a way that two profiles cross at two cross points, where one point is positioned on the field gradient region on the trailing side of the profile 60, and another point is positioned on the flat region of the profile 60. Thus, a distance D_(MW) between the end surface on the trailing side of the main magnetic pole 58 and an irradiation center 610 of the supplier of laser light is not required to be much smaller, compared to the distance in the case of using a near-field light generator. Under this arrangement, the magnetization of the magnetic recording layer 100 of the magnetic disk can be reversed in the region where the anisotropic field profile 61 underruns the effective write field profile 60 (anisotropic magnetic field H_(K)<effective write field H_(EFF)). A record bit 63 is formed on the magnetic recording layer 100 by reversing the direction 600 of write field, while the magnetic recording layer 100 is moving to the direction indicated by arrow 62 due to the magnetic disk rotation.

However in this case, the record bit 63, which has been once determined, comes close to the irradiation center 610 of the supplier of laser light after being written, and suffers a higher temperature 64. As a result, the magnetization transition region of the record bit 63 is disturbed; thus the record bit 63 may be damaged.

Whereas, as shown in FIG. 7 b, in the case that the supplier of laser light is disposed on the leading side from the main magnetic pole 58 of the head, an effective write field profile 65 and an anisotropic field profile 66 are arranged in such a way that two profiles cross at two cross points, where one point 69 is positioned on the flat region of the profile 65, and another point is positioned on the field gradient region on the leading side of the profile 65. In this case, the magnetization transition region of the record bit 68 is eventually decided at the cross point 69 where the field gradients of both profiles 65 and 66 are very small. Here the very small field gradient of the anisotropic field profile 66 means that the gradient of temperature is very small. As a result, the magnetization transition of record bit 68 is decided under the condition that gradients of both magnetic field and temperature are very small; thus, it becomes significantly difficult to achieve high linear recording density.

As described above, it is difficult to achieve a satisfying thermally-assisted magnetic recording which can respond to the requirement for high linear recording density, by just using a conventional supplier of light with a large spot diameter. Hereinafter, there will be explained the thermally-assisted magnetic recording according to the present invention.

FIG. 8 shows a schematic view for explaining an effective write field profile having a protruded portion on the trailing side according to the present invention.

As shown in FIG. 8, a write magnetic field, which is generated from the main pole tip 3400 (the first and second tip portions 3400A and 3400B) of the electromagnetic transducer 34, has components H_(P), H_(T) and H_(L). The write field component H_(P) is a component in the direction perpendicular to the surface of the magnetic recording layer (in X-axis direction). The write field component H_(T) is a component in the direction along the track in the surface of the magnetic recording layer (in Z-axis direction). Further, the write field component H_(L) is a component in the track width direction in the surface of the magnetic recording layer (in Y-axis direction). Each of these write field components H_(P), H_(T) and H_(L) has a value at the center position in the stacking direction (in X-axis direction) of the magnetic recording layer (perpendicular magnetization layer) 100 within the layer 100. Further, the electromagnetic transducer 34 has a main pole tip 3400 (the first and second tip portions 3400A and 3400B) and a trailing shield 3450 that is opposed to the end portion on the head part end surface 2210 side of the main pole tip 3400 through a very narrow gap.

The write field components H_(P), H_(T) and H_(L) can be expressed by profiles 70, 71 and 72 respectively, where the transverse axis shows position L in the direction along the track (in Z-axis direction). As easily understood by the profile 72, the write field component H_(L) is usually very small compared to the other write field components H_(P) and H_(T). Here, the effective write field H_(EFF), which works on the magnetic recording layer effectively to form record bits by reversing the magnetization of the magnetic recording layer, is expressed in the form depending on three write field components H_(P), H_(T) and H_(L) as follows:

H _(EFF)=((H _(P) ² +H _(T) ²)^(1/3) +H _(L) ^(2/3))^(3/2)   (2)

This is because: in the case of changing the direction of the magnetization, for example, from upside (+X direction) to downside (−X direction), while it is obvious that the write magnetic field component H_(P) in −X direction contributes to the reversal of the magnetization of the magnetic recording layer 100, the write field components H_(T) and H_(L) in respective Z-axis and Y-axis directions also contribute to the reversal of magnetization by inducing the precession movement of the magnetization. Therefore, the effective write field Ha can be expressed by a profile 73, where the transverse axis also shows position L. Here, because the end portion on the head part end surface 2210 side of the main pole tip 3400 is opposed to the trailing shield 3450 through a very narrow gap, the effective write field profile 73 is made to have a protruded portion 730 on the trailing side (+Z direction) due to the write field components H_(T) and H_(L). From a qualitative standpoint, it can be understood that the protruded portion 730 is caused by the tendency that generated write field concentrates on the edge portion of the main pole tip 3400 on the trailing shield 3450 side.

The height and width of the protruded portion 730 can be controlled by adjusting the sizes and shapes of the main pole tip 3400 and the trailing shield 3450 of the electromagnetic transducer 34, and the distance between them. Especially, an experimental result shows that it is possible to set the maximum value of the effective write field at the protruded portion 730 to be a sufficiently large value exceeding 25 kOe (kiloersteds), by adjusting the thickness T_(MPA) (FIGS. 4 a and 5) of the end portion of the first tip portion 3400A, the end portion having a high saturation magnetic flex density.

According to the present invention, thermally-assisted magnetic recording is performed by using the effective write field profile that is adjusted to have a protruded portion with a sufficiently large height on the trailing side (+Z side) as described above.

FIGS. 9 a and 9 b show schematic views illustrating effective write field profiles and anisotropic field profiles, for explaining the principle of the thermally-assisted magnetic recording according to the present invention. Further, FIG. 10 shows a schematic view illustrating anisotropic field profiles, for explaining the setting of the embedding amount D_(EMB) of the first tip portion 3400A into the groove 3540. For the thermally-assisted magnetic recording explained below, there is used a thermally-assisted magnetic recording head 21 in which, as shown in FIGS. 3, 4 a and 5, the end portion on the head part end surface 2210 side of the main pole tip 3400 is opposed to the trailing shield 3450 through a very narrow gap, and the spot center 3500 of the waveguide 35 is provided on the leading side from the main pole tip 3400.

As shown in FIG. 9 a, in the thermally-assisted magnetic recording according to the present invention, an effective write field profile 80 has a protruded portion 800 on the trailing side (+Z side). An anisotropic field profile 81 has a shape of wider valley than an anisotropic field profile in the case of using a near-field light generator. Further, the anisotropic field profile 81 is set in such a way as to traverse (pass across) the protrude portion 800. Therefore, the effective write field profile 80 and the anisotropic field profile 81 intersect at a point 84 positioned on the trailing side of the protruded portion 800 and at a point positioned on the leading side of the portion 800.

Here, it is important to set, as a parameter, a distance D_(MWE) in Z-axis direction between the spot center 3500 of laser light on the end surface 350 of the waveguide 35 and the trailing edge MPE on the end surface 3400 e of the main pole tip 3400. By setting the distance D_(MWE) to be an appropriate value, the anisotropic field profile 80 can be made to traverse the protruded portion 800 of the effective write field profile 80. In the case, the distance Dab is required to be sufficiently small in order to make the field gradient at the cross point 84 of the anisotropic field profile 81 (temperature gradient in the recording layer 100) as large as possible so that the magnetization transition of record bits becomes steeper.

The distance D_(MWE) is expressed as the above-described equation (1): D_(MWE)=T_(MPA)+D_(CENT)−D_(EMB), where D_(CENT) is a distance between the spot center 3500 and the upper surface 354 of the waveguide 35. In this expression, the thickness T_(MPA) at the end surface 3400 e of the main pole tip 3400 can be made sufficiently small by applying the tapered structure having the inclined surface 3400 a in the main pole tip 3400 (the second tip portion 3400B) as shown in FIGS. 4 a and 5. Further, suppose that the distance D_(CENT) between the spot center 3500 and the upper surface 354 of the waveguide 35 is determined by providing a groove 3540 with a predetermined depth. In this case, the distance D_(MWE) can be controlled to a smaller value by adjusting the embedding amount D_(EMB) between the upper surface 354 of the waveguide 35 and the lower (bottom) surface 3400 g of the first tip portion 3400A.

Here, it is assumed that the embedding amount D_(EMB) is set to be d_(SET) as shown in FIG. 10. The value of d_(SENT) is preferably less than 30% of the thickness T_(WG) of the waveguide 35. Hereinafter, there will be considered the variation in position of anisotropic field profile when changing the embedding amount D_(EMB) under the existence of a groove 3540 with a predetermined depth: D_(GR)=D_(EMB)+T_(CL1), based on anisotropic field profile 88 in the case of D_(EMB)=d_(SET) as shown in FIG. 10.

Anisotropic field profile 87 in the case that the embedding amount D_(EMB) is larger than d_(SENT) (D_(EMB)>d_(SET)) lies on the trailing side (+Z side) apart from the profile 88 by the length of arrow 85, and on the upper side apart from the profile 88 by the length of arrow 86, because the thickness T_(CL1)(=D_(GR)D_(EMB)) of the first clad layer 384 becomes smaller. The shift by the length of arrow 85 is derived from the close vicinity of the light spot to the trailing edge MPE due to the larger embedding amount D_(EMB). Further, the shift by the length of arrow 86 corresponds to a phenomenon that the first clad layer 384 functions less as a clad due to its smaller thickness; thus a part of laser light is absorbed into the main pole tip 3400, thereby heating ability of the laser light becomes degraded.

On the other hand, anisotropic field profile 89 in the case that the embedding amount D_(EMB) is smaller than d_(SET) (D_(EMB)<d_(SET)) lies on the opposite side to the profile 87 apart from the profile 88, because the thickness T_(CL1) (=D_(GR)−D_(EMB)) of the first clad layer 384 becomes larger. As described above, it is understood that the position of anisotropic field profile can be adjusted by changing the embedding amount D_(EMB).

Backing to FIG. 9 a, under the above-described setting, the magnetization of the magnetic recording layer 100 of the magnetic disk can be reversed in the region where the anisotropic field profile 81 underruns the effective write field profile 80 (anisotropic magnetic field H_(K)<effective write field H_(EFF)). A record bit 83 is formed on the magnetic recording layer 100 by reversing the direction 802 of write field, while the magnetic recording layer 100 is moving to the direction indicated by arrow 82 due to the magnetic disk rotation.

In this case, magnetization transition of the formed record bit 83 is eventually decided at the cross point 84 positioned on the trailing side of the protruded portion 800, where the field gradient is very large. Thereby, the magnetization transition regions become steeper; thus it is possible to form smaller record bit 83 and to achieve a high linear recording density. Moreover, the formed record bit 83 is moved away from the spot center 3500 of the waveguide 35; then is not exposed to higher temperature after being formed. As a result, the magnetization of record bit 83 becomes stable, which can contribute to the improvement in signal to noise ratio (SN ratio). As explained above, it is possible to form stable record bits pattern with steeper magnetization transition regions, without depending on the use of a near-field light generator, and to contribute to the improvement in both linear recording density and signal to noise ratio.

Next, with reference to FIG. 9 b, limitation to the position of the cross point 84 on the trailing side of the protruded portion 800 is explained. Here, the minimum value of effective write field in the region between both edges of the effective write field profile 80 is defined as EH_(MIN), and the maximum value of effective write field profile 80 in the protruded portion 800 as EH_(MAX). In this case, the value EH_(XP) of the effective write field at the cross point 84 on the trailing side of the protruded portion 800 preferably satisfies the following condition:

0.2×(EH _(MAX) −EH _(MIN))<=EH _(XP) −EH _(MIN)<=0.8×(EH _(MAX) −EH _(MIN))   (3)

This condition means that the cross point 84 on the trailing side of the protruded portion 800 is preferably located in the height range from two-tenth to eight-tenth of the height of the protruded portion 800, as shown in FIG. 9 b. Fulfillment of this condition effects assured improvement in signal to noise ratio.

Further, in the thermally-assisted magnetic recording of the present invention, it is preferable that the minimum value HK_(MIN) of anisotropic magnetic field in the anisotropic field profile 81 satisfies the condition: H_(MIN)>EH_(MIN), as shown in FIG. 9 a. The write field in the range between both edges of the profile 80 extends with some degree in the track width direction. Then, by setting the minimum value HK_(MIN) of anisotropic magnetic field in the anisotropic field profile 81 to be larger than at least the minimum value EH_(MIN) of effective write field, adjacent track erasure (ATE) can be prevented, which is a phenomenon that the effective write field unintentionally erases data written on the adjacent tracks.

FIGS. 11 a 1 to 11 m 2 show schematic views illustrating one embodiment of processes to form the waveguide 35 having the groove 3540, the main magnetic pole layer 340, the trailing shield 3450 and their surrounding structures in the manufacturing method of the thermally-assisted magnetic recording head 21 according to the present invention. FIG. 11 a 1 is a cross-sectional view taken by YZ plane that is to be the head part end surface 2210, FIG. 11 a 2 is a cross-sectional view taken by ZX plane, and FIG. 11 a 3 is a top view when viewed down from above the element-formation surface 2202 of the substrate 220. These also apply to FIGS. 11 b 1 to 11 m 2.

First, as shown in FIGS 11 a 1 to 11 a 3, after the insulating layer 383 and the waveguide 35 are formed, the first clad layer 384 is formed by stacking an insulating film thereon with a sputtering method, then by performing a polishing such as chemical mechanical polishing (CMP) on the film. Thus, the waveguide 35 is not exposed by the polishing. As a result, there can be avoided the situation that the first and second tip portions 3400A and 3400B which will be formed later contacts with the waveguide 35 and thus absorbs the waveguide light, thereby causing propagation loss to be increased. Then, as shown FIGS. 11 b 1 to 11 b 3, the first etching mask pattern 90 is formed of, for example, Ta by using a sputtering method, a photolithography method, a milling method and so on. After that, an etching is performed by using, for example, a reactive ion etching (RIE) method with a reactive gas of CF₄; thus a groove 3540 is formed in the waveguide 35.

Next, as shown in FIGS. 11 c 1 to 11 c 3, an insulating layer 91 which is to be a portion of the first clad layer is formed on the wall surfaces of the groove 3540 by using, for example, a sputtering method so that the upper surface 354 including the groove 3540 of the waveguide 35 is covered with the first clad layer 384. Here, as shown in FIG. 11 c 3, the width W_(P) of the groove 3540 in the track width direction (in Y-axis direction) at the position that is to be the head part end surface 2210 is set to be a predetermined value, the groove 3540 having wall surfaces opposed to each other on which the first clad layer 384 is formed. The width W_(P) is to be a width in the track width direction (in Y-axis direction) of the end surface 3400 e of the main pole tip 3400. Further, the distance D between the upper surface 354 of the waveguide and the bottom of the groove 3540 on which the first clad layer 384 lies is set to be a predetermined value, the distance D_(EMB) being to be an embedding amount into the groove 3540 of the first tip portion 3400A that is to be formed later. Furthermore, the width W_(PB) in the track width direction (in Y-axis direction) of the portion opposite to the portion with the width W_(P) is set to be a predetermined value (>=W_(P)). And the length in X-axis direction of the groove 3540 having the wall surfaces opposed to each other on which the first clad layer 384 is formed is set to be a larger value than L_(MP1), in consideration of the polishing for forming the head part end surface 2210.

After that, as shown in FIGS. 11 d 1 and 11 d 3, a magnetic film 95 is deposited in such a way that the groove 3540 is filled with the film, the magnetic film 95 being made of the constituent material of the first tip portion 3400A by using, for example, a plating method or a sputtering method. In the case of using a plating method, a seed layer as an electrode may be formed by using a sputtering method in advance of stacking the film. Next, as shown in FIGS. 11 e 1 to 11 e 3, non-embedded portion of the magnetic film 95 is removed by using a polishing such as CMP. In the polishing, the first etching mask pattern 90 functions as a stopper. After that, as shown in FIGS. 11 f 1 to 11 f 3, the first tip portion 3400A is formed by using an etching for adjustment such as a milling method in such a way that the remaining mask pattern 90 is removed. Here, the upper surface of the magnetic film 95 and the upper surface of the first clad layer 384 after etching are planarized to be on the same plane, and the thickness T_(MPA) of the first tip portion 3400A is set to be a predetermined value. The formed first tip portion 3400A has no contact with the waveguide 35; the first clad layer 384 lies between the portion 3400A and the waveguide 35 without fail.

Then, as shown in FIGS. 11 g 1 to 11 g 3, the second tip portion 3400B is formed on the first tip portion 3400A and the first clad layer 384 by using, for example, a plating method or a sputtering method. Here, the W_(MP1) in the track width direction (in Y-axis direction) of the second tip portion 3400B is set to be a predetermined value (>W_(P)). The formed second tip portion 3400B has no contact with the waveguide 35; the first clad layer 384 also lies between the portion 3400B and the waveguide 35 without fail.

After that, as shown in FIGS. 11 h 1 to 11 h 3, an insulating film 92 is deposited by using, for example, a sputtering method in such a way as to cover the second tip portion 3400B; then a polishing such as CMP is performed; thus the thickness T_(MPB) of the second tip portion 3400B is set to be a predetermined value. Here, a portion of the planarized insulating film 92 on the side opposite to the head part end surface 2210 (on +X side) from the planarized second tip portion 3400B becomes the second clad layer 50. Then, the thickness T_(CL2) of the second clad layer 50 coincides with the thickness T_(MPB) of the second tip portion 3400B.

Next, as shown in FIGS. 11 i 1 to 11 i 3, the second etching mask pattern 93 with a predetermined shape is formed of, for example, Ru by using, for example, a sputtering method, a photolithography method and a milling method, in such a way that the second etching mask pattern 93 at least covers the second tip portion 3400B except the end portion on the head part end surface 2210 side of the second tip portion 3400B. After that, an inclined surface 3400 a is formed at a portion to be the end portion on the head part end surface 2210 side of the second tip portion 3400B, by performing an etching of, for example, an ion-milling with the second tip portion 3400B as a mask.

After forming the inclined surface 3400 a, as shown in FIGS. 11 j 1 and 11 j 2, a gap layer 341 is formed by stacking an insulating film with use of, for example, a sputtering method, in such a way at least as to cover the inclined surface 3400 a. Then, as shown in FIGS. 11 k 1 and 11 k 2, the upper surface 94 of the end portion of the second tip portion 3400B opposite to the inclined surface 3400 a is exposed by using an etching such as an ion-milling etching. The exposed upper surface 94 of the second tip portion 3400B is to have an surface contact with a portion of the lower surface of a main pole body 3401 to be formed next, and thus is to be a magnetic-coupling portion between the portion 3400B and the main pole body 3401.

After that, as shown in FIGS. 11 l 1 and 11 l 2, by using a plating method or a sputtering method, formed are: a trailing shield 3450 that at least covers the gap layer 341 formed on the inclined surface 3400 a; and a main pole body 3401 that at least covers the exposed upper surface 94 of the second tip portion 3400B. Here, the trailing shield 3450 and the main pole body 3401 can be formed at one deposition by performing a plating with a predetermined frame. Next, as shown in FIGS. 11 m 1 and 11 m 2, after an insulating film is formed in such a way as to cover the whole, the upper surfaces of the trailing shield 3450 and the main pole body 3401 are planarized by using a polishing such as CMP, thereby thicknesses of the trailing shield 3450 and the main pole body 3401 are set to be predetermined values.

After that, a write coil layer 343, a coil insulating layer 344 and a write shield layer 345 are formed by using a well-known technique: thus, the thin-film process of head manufacturing is completed. Then, the wafer that has gone through the thin-film process is cut into row bars. Then, the row bar undergoes a polishing as a height process. Thus, an opposed-to-medium surface (head part end surface 2210) is formed, and completed is the main pole tip 3400 constituted of: the first tip portion 3400A embedded in the groove 3540 of the waveguide 35; and the second tip portion 3400B tapered in the stacking direction in such a way as to have the inclined surface 3400 a that reaches the head part end surface 2210.

As described above, the thermally-assisted magnetic recording head 21 can be completed, in which the distance between the light spot center of the waveguide 35 and the main magnetic pole layer 340 can be set to be sufficiently small under the condition that the absorption of light propagating through the waveguide 35 by the main pole tip 3400 and main pole body 3401 is sufficiently suppressed. Here, in the present embodiment, the width W_(P) of the main pole tip 3400 on the head part end surface 2210, as well as the embedding amount D_(EMB), is provided by using a thin-film process with high processing accuracy such as a sputtering method, a photolithography method and a milling method. Therefore, it is understood that the width W_(P) can be set with a smaller error.

Hereinafter, there will be explained practical examples of performing the thermally-assisted magnetic recording with the use of the thermally-assisted magnetic recording head according to the present invention.

(Practical Examples: Propagation Loss of Laser Light in Waveguide 35)

FIG. 12 shows a cross-sectional view taken by YZ plane, illustrating the configuration of a simulation system used in the present practical examples.

In the present practical examples, the transmittance of laser light propagating through the waveguide 35 was simulated in the configuration of the waveguide 35 and the first tip portion 3400A (electromagnetic transducer 34) shown in FIG. 12.

An experiment for the simulation analysis was implemented by using a three-dimensional Finite-Difference Time-Domain (FDTD) method, which is an electromagnetic field analysis technique. Laser light that entered the waveguide 35 was a Gaussian beam with a wavelength λ_(L) of 650 nm, having TM polarization (in which the oscillation direction of electric field of the laser light is perpendicular to the layer surface of the waveguide 35, that is, in Z-axis direction). The output power of the laser diode 40 was 10 mW.

Further, as shown in FIG. 12, the waveguide 35 as a core had a width W_(WG1) of 0.8 μm and a thickness T_(WG) of 0.5 μm, and was formed of TaO_(X) (refractive index n=2.15). The insulating layer 96 and the first clad layer 384 as a clad were formed of Al₂O₃ (refractive index n=1.65). Further, the thickness T_(CL1) of the first clad layer 384 in the groove 3540, that is, the gap between the first tip portion 3400A and the waveguide 35, was 30 nm. Both of the width W_(P) and thickness T_(MPA) of the first tip portion 3400A were 0.1 μm, and the embedding amount D_(EMB) was also 0.1 μm. The length L_(MP 1)was set to be each of 0 μm, 0.1 μm, 0.5 μm, 1.0 μm, 3.0 μm, 5.0 μm, 10 μm as a parameter that influences the propagation loss. The first tip portion 3400A was formed of FeNi. The real part of refractive index of FeNi was 2.92, and the imaginary part was 4.18.

FIG. 13 shows a graph illustrating the simulation result of the transmittance of laser light in the waveguide 35. The transverse axis of the graph corresponds to the length L_(MP1) of the first tip portion 3400A, and the vertical axis is transmittance T. The transmittance T was calculated by using the definition: T=I_(out)/I_(IN), where I_(IN) was the intensity of laser light incident on the end surface 352 of the waveguide 35, and I_(OUT) was the intensity of laser light emitted from the end surface 350 of the waveguide 35.

As shown in FIG. 13, the transmittance T shows a tendency to decrease as the length L_(MP1) of the first tip portion 3400A increases. However, in the range of L_(MP1) from 0 μm to 10 μm represented in the figure, the transmittance T shows a satisfying value in the range from approximately 0.7 to 1 (approximately 70% to 100%). That is, under the condition that the embedding amount D_(EMB) of the first tip portion 3400A is 0.1 μm and the gap between the first tip portion 3400A and the waveguide 35 is 30 nm, the transmittance T shows a preferable value in the preferable range of L_(MP1) from 3 to 4 μm. Therefore, it is understood that it is also preferable from a viewpoint of the transmittance T to set the length L_(MP1) of the first tip portion 3400A to be within the range from 3 to 4 μm. Further, when the embedding amount D_(EMB) was set to be a larger value of 0.15 μm, any waveguide mode did not exist in the waveguide 35; thus any laser light did not propagate through the waveguide 35. Here, the thickness T_(Wg) of the waveguide 35 was 0.5 μm. Therefore, the embedding amount D_(EMB) is preferably less than 30% of the thickness T_(WG) of the waveguide 35, and is more preferably 20% or less of the thickness T_(WG) of the waveguide 35.

(Practical Examples: Recording and Reproducing Characteristics)

Lastly, there is shown a practical example of actually performing the thermally-assisted magnetic recording with use of the thermally-assisted magnetic recording head 21 including the waveguide 35 and electromagnetic transducer 34 shown in FIGS. 4 a and 5.

In the practical example, the configuration of the waveguide 35 and the electromagnetic transducer 34 was almost the same as the above-described one. Note that the length L_(MP1) of the first tip portion 3400A was 3 μm, the embedding amount D_(EMB) was also 0.1 μm, and the gap between the first tip portion 3400A and the waveguide 35, that is, the thickness T_(CL1) of the first clad layer 384 was 30 nm. However, the thickness T_(MPA) of the first tip portion 3400A were 0.13 μm; thus, the upper surface of the portion 3400A and the upper surface of the layer 384 are planarized to be almost on one plane. Further, both of the thickness T_(MPB) of the second tip portion 3400B and the thickness T_(CL2) of the second clad layer 50 were 100 nm. And the distance D_(MWE) between the light spot center 3500 on the end surface 350 of the waveguide 35 and the trailing edge MPE of the end surface 3400 e of the main pole tip 3400 was 0.28 μm, which was derived from the above-described expression (1) under the condition that the thickness T_(MPA) was 0.13 μm, the distance D_(CENT) was 0.25 μm, and the embedding amount D_(EMB) was 0.1 μm.

Further, the traveling linear speed due to the rotation of the magnetic disk 10 was 1.5 m/s (meter/second). The magnetic spacing was 6 nm, which was a distance between the surface of magnetic recording layer and the ends of MR element 33 and electromagnetic transducer 34. The magnetic recording medium used in the present example was a magnetic disk in which sequentially stacked on a glass substrate are: a soft-magnetic under layer with thickness of 20 nm; an intermediate layer with thickness of 5 nm; and a magnetic recording layer with thickness of 10 nm. The average value of grain sizes of the magnetic recording layer was 4 nm. The magnetic anisotropy energy KU was 2×10⁷ erg/cc, and the anisotropic magnetic field H_(K) was 40 kOe at room temperature. Further, the output of laser diode 40 was 8 mV. The wavelength λ_(L) of laser light was 650 nm. The diameter of the light spot of laser light emitted from the waveguide 35 was 500 nm.

Table 1 shows linear recording densities obtained in the recording and reproducing operations of the present practical example and a comparative example. And FIG. 14 shows a schematic view illustrating a main part of the head used in the comparative example. The comparative example was implemented with use of a head and an apparatus having the same condition as the above-described one, except that no groove was provided in the waveguide 97 and the first tip portion 98 is opposed to the waveguide 97 through the first clad layer 99.

TABLE 1 Linear recording density (kFCI) Comparative 1600 example Practical 1900 example

As shown in Table 1, in the present practical example, large linear recording density of 1900 kFCI (Flux Change per Inch) was obtained by using the thermally-assisted magnetic recording in which the laser diode 40 was actually driven under the above-described condition. It is understood that the linear recording density of the present practical example has been improved by 20% compared to the linear recording density (1600 kFCI) of the comparative example in which the first tip portion 98 is apart from the waveguide 97.

As understood from the above-described examples, according to the present invention, it is possible to perform a satisfying thermally-assisted magnetic recording without depending on the use of a near-field light generator, in which the absorption of light propagating through the waveguide by the main magnetic pole is suppressed sufficiently by means of a groove provided in the waveguide, into which a portion of the main pole tip is embedded. Further, it is possible to form stable record bits pattern having steep magnetization transition regions without depending on the use of a near-field light generator.

All the foregoing embodiments are by way of example of the present invention only and not intended to be limiting, and many widely different alternations and modifications of the present invention may be constructed without departing from the spirit and scope of the present invention. Accordingly, the present invention is limited only as defined in the following claims and equivalents thereto. 

1. A thermally-assisted magnetic recording head comprising: a waveguide for guiding a light for thermal-assist to a magnetic recording medium, formed in an element-formation surface of a substrate and extending to an opposed-to-medium surface of the head; and a write head element formed on a trailing side from the waveguide and comprising: a main magnetic pole for applying a write magnetic field to the magnetic recording medium; and an auxiliary magnetic pole provided on a trailing side of the main magnetic pole, the main magnetic pole comprising: a main pole tip extending to the opposed-to-medium surface; and a main pole body provided on an end portion of the main pole tip, the end portion being on an opposite side to the opposed-to-medium surface, a groove being provided in an upper surface of the waveguide, at least a portion of the main pole tip being embedded in the groove, and a portion of a first clad layer that acts as a clad with respect to the propagation of the light being sandwiched between the at least a portion of the main pole tip and the groove, and a second clad layer that acts as a clad for propagation of the light being provided on the first clad layer and on a rear side from the main pole tip when viewed from the opposed-to-medium surface side.
 2. The thermally-assisted magnetic recording head as claimed in claim 1, wherein the main pole tip has a width in a track width direction smaller than that of the main pole body.
 3. The thermally-assisted magnetic recording head as claimed in claim 1, wherein the main pole tip comprises a first tip portion extending to the opposed-to-medium surface and a second tip portion provided on the first tip portion, an upper surface of the first tip portion and an upper surface of the first clad layer being planarized to be substantially in one plane, and wherein an end portion on the opposed-to-medium surface side of the second tip portion is tapered in a stacking direction in such a way that an inclined surface reaching the opposed-to-medium surface is provided on a trailing side of the end portion.
 4. The thermally-assisted magnetic recording head as claimed in claim 1, wherein an embedding amount that is a distance between an upper surface of the waveguide and a bottom surface of the main pole tip embedded in the waveguide is less than 30 percent of a thickness of the waveguide.
 5. The thermally-assisted magnetic recording head as claimed in claim 1, wherein a length of the at least a portion of the main pole tip that is embedded in the groove is 3 micrometers or more, and 4 micrometers or less, the length being in a direction perpendicular to the opposed-to-medium surface.
 6. The thermally-assisted magnetic recording head as claimed in claim 1, wherein a third clad layer is provided between the second clad layer and the main pole body.
 7. The thermally-assisted magnetic recording head as claimed in claim 6, wherein an end of the third clad layer on the opposed-to-medium surface side is recessed by a predetermined distance from an end of the main pole tip when viewed from the opposed-to-medium surface side, the end of the main pole tip being on an opposite side to the opposed-to-medium surface.
 8. The thermally-assisted magnetic recording head as claimed in claim 7, wherein the predetermined distance is 1 micrometer or more, and 2 micrometers or less.
 9. The thermally-assisted magnetic recording head as claimed in claim 1, wherein an effective write field profile has a protruded portion on a trailing side, the effective write field profile being an intensity distribution of write magnetic field generated from the main pole tip, with respect to positions along a track in a recording layer of the magnetic recording medium, and wherein an anisotropic field profile traverses the protruded portion of the effective write field profile, the anisotropic field profile being a distribution of anisotropic magnetic field with respect to positions along a track in the recording layer when a portion of the recording layer is irradiated directly with light emitted from the waveguide; thus an anisotropic magnetic field of the portion is decreased.
 10. The thermally-assisted magnetic recording head as claimed in claim 9, wherein a minimum value HK_(MIN) of anisotropic magnetic field in the anisotropic field profile satisfies a condition: HK_(MIN)>EH_(MIN), where EH_(MIN) is a minimum value of write magnetic field in a range between both edges of the write field profile.
 11. The thermally-assisted magnetic recording head as claimed in claim 1, wherein a light source for emitting the light for thermal-assist is provided on or near an end surface of the waveguide on an opposite side to the opposed-to-medium surface.
 12. A head gimbal assembly comprising a suspension and a thermally-assisted magnetic recording head as claimed in claim 1 fixed on the suspension.
 13. A magnetic recording apparatus comprising: at least one head gimbal assembly comprising a suspension and a thermally-assisted magnetic recording head fixed on the suspension; at least one magnetic recording medium; and a recording circuit for controlling write operations which the thermally-assisted magnetic recording head performs to the magnetic recording medium, the thermally-assisted magnetic recording head comprising: a waveguide for guiding a light for thermal-assist to the magnetic recording medium, formed in an element-formation surface of a substrate and extending to an opposed-to-medium surface of the head; and a write head element formed on a trailing side from the waveguide and comprising: a main magnetic pole for applying a write magnetic field to the magnetic recording medium; and an auxiliary magnetic pole provided on a trailing side of the main magnetic pole, the main magnetic pole comprising: a main pole tip extending to the opposed-to-medium surface; and a main pole body provided on an end portion of the main pole tip, the end portion being on an opposite side to the opposed-to-medium surface, a groove being provided in an upper surface of the waveguide, at least a portion of the main pole tip being embedded in the groove, and a portion of a first clad layer that acts as a clad with respect to the propagation of the light being sandwiched between the at least a portion of the main pole tip and the groove, and a second clad layer that acts as a clad for propagation of the light being provided on the first clad layer and on a rear side from the main pole tip when viewed from the opposed-to-medium surface side, and the recording circuit further comprising a light-emission control circuit for controlling operations of emitting the light.
 14. The magnetic recording apparatus as claimed in claim 13, wherein a light source is provided which supplies the light for thermal-assist to an end surface of the waveguide on an opposite side to the opposed-to-medium surface.
 15. A manufacturing method of a thermally-assisted magnetic recording head comprising steps of: forming a first clad layer that acts as a clad for propagation of a light on a waveguide that acts as a core for propagation of the light; forming a first etching mask pattern with a predetermined shape on the first clad layer; then forming a groove extending into the waveguide in an upper surface of the first clad layer by performing an etching with the first etching mask pattern as a mask; forming an insulating film that is to be a portion of the first clad layer on the wall surface of the groove so that the upper surface including the groove of the waveguide is covered with the first clad layer; depositing a magnetic film in such a way that the groove is filled with the magnetic film, then performing a polishing or etching so as to remove the first etching mask pattern, thereby an upper surface of the magnetic film and an upper surface of the first clad layer being planarized to be substantially in one plane; thus forming a first tip portion of the main pole tip; forming a second tip portion on the first tip portion, then forming a second etching mask pattern with a predetermined shape in such a way that the second etching mask pattern at least covers the second tip portion except a portion to be an end portion on the opposed-to-medium surface side of the second tip portion, then forming an inclined surface in the portion to be the end portion on the opposed-to-medium surface side of the second tip portion, by performing an etching with the second etching mask pattern as a mask; and after that, forming the first tip portion embedded in the groove of the waveguide and the second tip portion tapered in a stacking direction in such a way that the inclined surface reaching the opposed-to-medium surface is provided, by forming the opposed-to-medium surface with use of a polishing as a height process.
 16. The manufacturing method as claimed in claim 15, wherein, in the step of forming the insulating film to be a portion of the first clad layer on the wall surface of the groove, a width in a track width direction at the position to be the opposed-to-medium surface in the groove in which the insulating film is deposited on the wall surfaces opposed to each other is set to be a width desired as a width of the main pole tip.
 17. The manufacturing method as claimed in claim 15, wherein, after the inclined surface is formed in the end portion of the second tip portion to be near the opposed-to-medium surface, a gap layer is formed by depositing an insulating film in such a way that at least the inclined surface is covered with the insulating film, then an upper surface of the end portion of the second tip portion opposite to the inclined surface is exposed by performing an etching, after that, formed is a trailing shield that covers at least the gap layer formed on the inclined surface and a main pole body that covers at least the exposed upper surface of the second tip portion. 